Imaging by Synchrotron Radiation
نویسندگان
چکیده
منابع مشابه
Microsystem and Microelectronic Devices Investigated by Synchrotron-Radiation Imaging Techniques
Due to increasing packing density and ongoing miniaturization there is a growing need for non-destructive quality assurance of devices in microsystem technology, especially for techniques providing high spatial resolution. The tendency towards short electrical interconnections often results in burried structures which cannot be verified visually. In laboratories, various x-ray techniques are ro...
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ژورنال
عنوان ژورنال: TRENDS IN THE SCIENCES
سال: 2010
ISSN: 1884-7080,1342-3363
DOI: 10.5363/tits.15.8_24